ZunXin

This overhead automated transport system handles the automatic transfer of FOUPs
in semiconductor processes. It integrates seamlessly with Stockers/EQ using the E84 standard communication
protocol for semiconductor equipment and complies with SEMI standards, ensuring smooth data interaction with
higher-level systems. The system uses contactless power supply to meet cleanroom requirements, achieving
Class 100 cleanliness standards.

Key Features:

• Overhead automated transport system for semiconductor fabs
• Controlled by the OCS to automate FOUP transportation
• Integrates with Stockers/EQ via E84 standard communication protocol
• Complies with SEMI standards, enabling data interaction with higher systems
• Contactless power supply ensures cleanroom Class 100 compliance

Stocker uses 300/200mm FOUP standard SEMI carriers in semiconductor applications.
It interfaces seamlessly with OHT via the E84 standard, enabling automatic loading and unloading
operations without manual intervention while interacting with the MES system in real time.
By integrating various status data, it supports the design of smart factory management modules,
offering efficient development tailored to customer needs and site conditions.

Key Features:

• Supports 300/200mm FOUP standard SEMI carriers for semiconductor applications
• Seamless interface with OHT using the E84 standard
• Enables automatic loading/unloading without manual intervention and real-time MES data interaction
• Integrates status data to support smart factory management module design
• Customizable and efficiently developed to meet customer requirements and site conditions

The Tower Stocker is designed for efficient wafer storage and management.
It features a vertical storage tower with multiple horizontal wafer racks, enabling high-capacity storage and
easy access to individual wafers. The system allows for automated management, minimizing manual intervention
while improving the efficiency and accuracy of production lines.

Key Features:

• Equipment for wafer storage and management
• Composed of a vertical tower and multiple horizontal wafer racks
• Capable of storing large volumes of wafers with easy access to each wafer
• Enables automated management, reducing manual involvement
• Enhances production line efficiency and accuracy

The Lifter plays a key role in transferring silicon wafers between different floors in semiconductor production.
Through advanced automation, it ensures fast, precise, and efficient operations, significantly reducing the reliance on manual labor and minimizing errors in the production process. The Lifter can seamlessly integrate with other AMHS equipment, including conveyor and storage systems, to form a fully automated logistics network. A central control system manages these integrations, enabling complete automation of production lines. The AMHS Lifter is an indispensable part of modern semiconductor manufacturing, offering enhanced efficiency, reliability, and production quality.

Key Features

• Transfers silicon wafers efficiently between floors.
• Automates processes to reduce manual labor.
• Minimizes errors in the production process.
• Integrates with conveyors and storage systems.
• Enables complete automation with centralized control.
• Enhances production line efficiency and reliability.

The OHB is a storage device installed below the ceiling to hold FOUPs.
It interfaces automatically with OHT systems, minimizing floor space usage and allowing for the
installation of additional production equipment. The OHB utilizes space efficiently to increase
FOUP storage capacity in confined areas.

Key Features:

• Stores FOUPs below the ceiling for optimized space utilization
• Maximizes vertical space to increase FOUP storage in limited areas
• Automatically interfaces with OHT systems
• Reduces floor space usage, enabling more production equipment installation

The E-RACK manages logistics information for FOUP/POD in semiconductor wafer processes.
It communicates with the upper MES system to provide real-time location updates, reducing
manual search time and improving production management efficiency.

Key Features:

• Manages logistics information for FOUP/POD in wafer processes
• Communicates with the upper MES system to update real-time locations
• Saves search time and enhances production management efficiency

The Manual Workstation (MS) is a node in an automated production line or workflow, typically requiring manual intervention and operation. It can communicate with the upper-level MES to handle specific tasks that the automated system cannot easily complete.